Research Facility
Device Fabrication
Cleanroom
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![](image/clean1.jpg)
![](image/clean5.jpg)
![](image/clean4.jpg)
Mainly used for device fabrication of 2D materials. Air shower is equipped.
Lithography set-up
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![](image/mask_aligner1.jpg)
Photolthography set-up for electrode patterning.
![](image/EBL1.jpg)
Electron Beam Lithography(EBL) set-up with precise piezo motor stage.
E-Beam and Thermal Evaporator
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![](image/evaporator.jpg)
Electron Beam Evaporator under ~10-5Pa base pressure.
![](image/organic.jpg)
Thermal Evaporator for organic materials. By using liquid hellium, available to deposit under liquid He temperature.
More evaporators are avarable.
Other fabrication facility
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![](image/manipulator1.jpg)
Van der Waals heterostructure factory with optical microscopy.
![](image/rta.jpg)
Rapid Thermal Annealer under Ar/H2 environment.
![](image/tube.jpg)
CVT set-up for oxidazation and crystal growth.
![](image/bonder.jpg)
Bondhing machine.
![](image/ozone.jpg)
UV ozone cleaner.
![](image/Plasma.jpg)
Home-built dry reactive ion etching machine.
Device Evaluation Facility
Probe station
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![](image/prosta.jpg)
Variable temperature probe station. AC/DC transport measurement, optical measurement and high temperature measurement are available.
![](image/lowtprober.jpg)
Variable temperature probe station ranging from 10K to 440K. AC/DC transport measurement is available.
Scanning probe microscopy
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![](image/afmmolecular.jpg)
Custormized AFM/EFM/MFM/SGM sysytem. Transport measurement and AFM lithography are also available.
![](image/vac-AFM.jpg)
AFM/EFM/SGM sysytem under vacuum.
Optics
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![](image/laser11.jpg)
532nm green laser set-up and optical vortex set-up eqquiped with probe station.
![](image/DSC_0285.jpg)
![](image/DSC_0284.jpg)
Raman spectroscopy set-up equipped with optical microscope.
Low temperature measurement facility
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![](image/magnet9t.jpg)
He cryostat with 9 tesla superconducting magnet.
![](image/8tmagnet.jpg)
![](image/3heoxford.jpg)
He cryostat with 9 tesla superconducting magnet.
![](image/3hejanis.jpg)
3He insert for 300mK measurement.
![](image/dilution.jpg)
3He/4He dilution insert for 100mK measuremnt.
![](image/LT-SPM2.jpg)
SPM system for ultra low temperature environment. AFM/SGM/EFM measurement is availbale.